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產(chǎn)品名稱: Edwards STP301 / C磁懸浮分子泵
產(chǎn)品型號(hào): B74830020
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards STP301 / C磁懸浮分子泵
的詳細(xì)介紹
Edwards STP301 / C Turbomolecular Vacuum Pump - NEW
Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries.
This STP pump is supplied with an inlet screen.
Advanced Rotor Technology
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Maximized process flexibility
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Oil free
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Low vibration
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High reliability
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Maintenance free
Advanced Controller Design
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Auto tuning
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Self diagnostic functions
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DC motor drive
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Battery-free operation
Compact Design
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Small footprint
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Half rack controller
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Inlet flange
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VG-100 / ISO-100 / ICF-152
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Outlet port
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KF-25
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Pumping speed
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N2
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300 l/s
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H2
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300 l/s
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Compression ratio
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N2
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> 108
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H2
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> 2 x 104
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Ultimate pressure w/ bake out heating
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6.5 x 10-6 Pa (5 x 10-8 Torr)
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Max. allowable inlet pressure
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0.066 Pa
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Max continuous outlet pressure
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13 Pa
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Rated speed
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48,000 rpm
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Starting time
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3 min
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Max inlet flange temperature
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120°C
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Input voltage
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100 to 120
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Power consumption
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0.55 kVA
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Weight
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11 kg
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Edwards STP301 / C Turbomolecular Vacuum Pump - NEW
P/N B748-30-020 / B74830020 STP301 ISO-100
P/N B748-31-010 / B74831010 STP301 DN 100 CF
P/N B748-71-010 / B74871010 STP301C ISO-100
B748-81-010 / B74881010 STP301C DN 100 CF
