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產(chǎn)品名稱: Edwards nEXT85渦輪分子泵
產(chǎn)品型號(hào): B8G210A01
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無相關(guān)文檔
簡(jiǎn)單介紹
Edwards nEXT85渦輪分子泵
的詳細(xì)介紹
Edwards nEXT85 Compound Turbomolecular Vacuum Pump - NEW
The nEXT85 turbomolecular pump builds upon the success of the highly successful EXT75DX to deliver a pump with significantly improved performance in a smaller package.
The rotor has been totally re-designed to optimise pump performance and achieve both higher speeds and higher compression while maintaining high levels of reliability.
In addition to enhanced performance nEXT85 benefits from the same service and operational functionalities from the larger nEXT range, including field serviceability and in-built intelligence, for a truly class leading product.
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Specifications
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nEXT85D
NW-40
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nEXT85H
NW-40
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nEXT85D
ISO-63
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nEXT85H
ISO-63
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nEXT85D
CF-63
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nEXT85H
CF-63
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nEXT85D
ISO-100
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nEXT85H
ISO-100
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Main inlet pumping speed l/s
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N2
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47
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84
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86
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He
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61
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78
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80
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78
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H2
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49
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44
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60
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54
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60
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54
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60
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54
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Ar
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44
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80
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84
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Peak compression ratio from the backing port to the main inlet port
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N2
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> 1011
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He
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8 x 106
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2 x 107
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8 x 106
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2 x 107
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8 x 106
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2 x 107
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8 x 106
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2 x 107
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H2
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2 x 105
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Ar
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> 1011
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Ultimate pressure
mbar (Torr)
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< 5 x 10-9 (< 3.8 x 10-9)
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< 5 x 10-10 (< 3.8 x 10-10)
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< 5 x 10-9 (< 3.8 x 10-9)
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Weight
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2.9 kg (6.4 lbs)
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3 kg (6.6 lbs)
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4.4 kg (9.7 lbs)
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3.2 kg (7 lbs)
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Forced air cooling (20°C Ambient)
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Natural convection (35°C Ambient)
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Forced air cooling (40°C Ambient)
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Water cooling (40°C Ambient)
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Maximum continuous backing pressure at ultimate inlet pressure mbar
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N2
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18
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10
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11
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17
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Maximum input flow sccm
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N2
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60
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22
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25
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42
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Ar
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21
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7
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15
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He
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232
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96
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128
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191
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Operation
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Vertical and upright to horizontal ± 2°
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Edwards MODEL: nEXT85 Compound Turbomolecular Vacuum Pump - NEW
CODE: B8G2-10-B01 / B8G210B01 nEXT85D ISO-63 NW-16 80W
CODE: B8G2-10-C01 / B8G210C01 nEXT85D CF-63 NW-16 80W
CODE: B8G2-10-101 / B8G210101 nEXT85D ISO-100 NW-16 80W
B8G2-10-A01 / B8G210A01 nEXT85D NW-40 NW-16 80W
B8G2-40-101 / B8G240101 nEXT85D ISO-100 NW-25 80W
B8G2-11-B01 / B8G211B01 nEXT85ID ISO-63 NW-16/16 80W
B8G2-14-B01 / B8G214B01 nEXT85ID ISO-63 NW-16/25 80W
B8G4-10-B01 / B8G410B01 nEXT85H ISO-63 NW-16 80W
B8G4-10-C01 / B8G410C01 nEXT85H CF-63 NW-16 80W
B8G4-10-A01 / B8G410A01 nEXT85H NW-40 NW-16 80W
B8G4-11-C01 / B8G411C01 nEXT85IH CF-63 NW-16/16 80W
B8G4-10-101 / B8G410101 nEXT85H ISO-100 NW-16 80W
